Handbook of Micromachining and Microfabrication

Preface vii Micromachining and Trends for the Twenty-First Century 3(38) Paul J. McWhorter A. Bruno Frazier P. Rai-Choudhury Wet Chemical Etching of Silicon and SiO2, and Ten Challenges for Micromachiners 41(58) Don L. Kendall Robert A. Shoultz Applications of Dry Etching to Microsensors, Field Emitters, and Optical Devices 99(54) Stella W. Pang Focused Ion Beams for Micromachining and Microchemistry 153(44) Diane K. Stewart J. David Casey, Jr. Plating Techniques 197(102) Lubomyr T. Romankiw Eugene J. M. O'Sullivan High Aspect Ratio Processing 299(80) Craig R. Friedrich Robert Warrington Walter Bacher Werner Bauer Philip J. Coane Jost Gottert Thomas Hanemann Jurgen HauBelt Mathias Heckele Regina Knitter Jurgen Mohr Volker Piotter Hans-Joachim Ritzhaupt-Kleissl Robert Ruprecht Sensors and Actuators 379(56) Hal Jerman Stephen Terry Micro-Optical Devices 435(82) Hiroyuki Fujita Hiroshi Toshiyoshi Micromachined Systems for Neurophysiological Applications 517(54) Khalil Najafi Thin-Film-Transistor-Addressed Liquid Crystal Displays 571(46) Fang-Chen Luo Microsensors, Actuators, Mems, and Electronics for Smart Structures 617(72) Vijay K. Varadan Vasundara V. Varadan Index 689