Introduction to Vacuum Technology

Much Ado About Vacuum 1(8) Introduction 1(1) What Is a Vacuum? 2(1) Benefits of a Vacuum 3(2) Processes That Use a Vacuum 5(1) Creating a Vacuum 6(1) Looking Ahead 6(3) The Behavior Of Gases 9(26) Introduction 9(1) States of Matter 10(2) Kinetic Theory of Gases 12(8) Ideal Gas Law 20(2) Gas Pressure 22(2) Mean Free Path 24(2) Adsorption and Desorption 26(1) Diffusion and Permeation 27(1) Thermal Conductivity 27(1) Vapor Pressure 28(7) Summary 30(5) An Introduction To Vacuum Systems 35(20) Introduction 35(1) Gas Loads 36(3) Vacuum Chamber 39(1) Vacuum Pumps 39(3) Vacuum Gauges 42(2) Vacuum System Components 44(2) Conductance 46(2) A Simple Vacuum System 48(2) Characterizing Vacuum Systems 50(5) Summary 51(4) Rough Vacuum Regime 55(32) Introduction 55(2) Gas Load in the Rough Vacuum Regime 57(1) Pumping Down a Rough Vacuum System 58(1) Rough Vacuum Pumps 59(8) Rough Vacuum Gauges 67(6) Valves and Fittings 73(3) Rough Vacuum Pump Downs 76(3) Conductance 79(3) Troubleshooting Rough Vacuum Systems 82(5) Summary 83(4) The High-Vacuum Regime 87(30) Introduction 87(1) Gas Load in the High-Vaccum Regime 88(2) High-Vacuum Systems 90(2) High-Vacuum Pumps 92(9) High-Vacuum Gauges 101(5) Conductance 106(2) High-Vacuum Pump Downs 108(3) Water in High-Vacuum Systems 111(6) Summary 111(6) Partial Pressure Analysis Using Residual Gas Analyzers 117(24) Introduction 117(1) Construction and Operation of a Quadrupole RGA 118(8) Partial Pressure Measurement 126(3) Interpreting Mass Spectra 129(4) Uses of a Residual Gas Analyzer 133(8) Summary 137(4) Leak Detection In Vacuum Systems 141(16) Introduction 141(2) Leak Detection Methods 143(3) Helium Mass Spectrometer Leak Detectors 146(2) Calibration and Standard Leaks 148(3) Selecting a Helium Leak Detector 151(3) Using an RGA for Leak Detection 154(3) Summary 155(2) Gas Delivery And Pressure Control 157(20) Introduction 157(1) Gas Delivery 158(5) Mass Flow Controllers 163(10) Downstream Pressure Control 173(1) Upstream Pressure Control 174(3) Summary 175(2) Safety Issues In Vacuum Systems 177(8) Introduction 177(1) Electrical Hazards 178(1) Mechanical Hazards 179(1) Vaccum Hazards 180(1) Thermal Hazards 181(1) Pressurized Devices 182(1) Chemical Hazards 182(3) Summary 183(2) Index 185