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An Introduction to Surface-Micromachining

Specificaties
Gebonden, 189 blz. | Engels
Springer US | 2004e druk, 2004
ISBN13: 9781402080203
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Springer US 2004e druk, 2004 9781402080203
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Samenvatting

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Specificaties

ISBN13:9781402080203
Taal:Engels
Bindwijze:gebonden
Aantal pagina's:189
Uitgever:Springer US
Druk:2004

Inhoudsopgave

1. Introduction.- 1.1 Why miniaturize?.- 1.2 Why surface-micromachining?.- 1.3 History.- References.- I Fabrication.- 2. Microfabrication Processes.- 3. Micromachining Technologies.- II Design.- 4. Microscale Physics.- 5. Mechanics.- 6. Design Rules.- 7. Non-Ideal Processes.- 8. Design Techniques.- III Devices.- 9. Electrical Components.- 10. Mechanical Components.- 11. Electrostatic Actuators.- 12. Electro-Thermal-Compliant Actuators.- 13. Raised Structures.- IV Processes.- 14. PolyMUMPsTM Process.- 15. SUMMiTTM Process.- 16. MUSiC® Process.

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        An Introduction to Surface-Micromachining