Meer over Janusz Bogdanowicz

Janusz Bogdanowicz

Photomodulated Optical Reflectance

Name: Photomodulated Optical Reflectance
Author: Janusz Bogdanowicz

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Specificaties

Paperback, 204 blz. | Engels

Springer Berlin Heidelberg | 2012e druk, 2014

ISBN13: 9783642426865

Rubricering

Juridisch :

Springer Berlin Heidelberg 2012e druk, 2014 9783642426865

Onderdeel van serie Springer Theses

€ 120,99

In winkelwagen

Levertijd ongeveer 9 werkdagen

Gratis verzonden

Samenvatting

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Specificaties

ISBN13:9783642426865

Taal:Engels

Bindwijze:paperback

Aantal pagina's:204

Uitgever:Springer Berlin Heidelberg

Druk:2012

Serie:Springer Theses

Inhoudsopgave

Theory of Perturbation of the Reflectance.- Theory of Perturbation of the Refractive Index.- Theory of Carrier and Heat Transport in Homogeneously Doped Silicon.- Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers.- Assessment of the Model.- Application of the Model to Carrier Profling.

Uw winkelwagen

Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Samenvatting

Specificaties

Inhoudsopgave

Net verschenen

Rubrieken

Personen

Trefwoorden